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KATSUMATA Hiroshi
Department Undergraduate School , School of Science and Technology Position Associate Professor |
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| Language | English |
| Publication Date | 2010/12 |
| Type | International Conference |
| Title | Resistivity variation of TaN thin films for barrier metal |
| Contribution Type | Co-authored (other than first author) |
| Journal | Proc. of the 29th Symposium on Matererials Science and Engineering Research Center of Ion Beam Technology, Hosei University |
| Volume, Issue, Page | pp.49-54 |
| Author and coauthor | H.Tajima,T.Tanaka,H.Katsumata, and S.Uekusa |