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KATSUMATA Hiroshi
Department Undergraduate School , School of Science and Technology Position Associate Professor |
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| Language | English |
| Publication Date | 2001/09 |
| Type | Academic Journal |
| Peer Review | Peer reviewed |
| Title | Evaluation of oxygen-plasma damage in GaAs exposed to a surface-wave plasma source developed for the ashing process |
| Contribution Type | Co-authored (other than first author) |
| Journal | Jpn. J. Appl. Phys. |
| Volume, Issue, Page | 40,pp.5438-5443 |
| Author and coauthor | K. Aoki, S. Uekusa, T. Yamauchi, and H. Katsumata |