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KATSUMATA Hiroshi
Department Undergraduate School , School of Science and Technology Position Associate Professor |
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| Language | English |
| Publication Date | 2012/04 |
| Type | Academic Journal |
| Peer Review | Peer reviewed |
| Title | Deposition of TaN Films by RF sputtering and their barrier properties in Cu/TaN/Dielectrics/Si MIS structures |
| Contribution Type | Co-authored (other than first author) |
| Journal | e-Journal of Surface Science and Nanotechnology |
| Volume, Issue, Page | 10,pp.107-113 |
| Author and coauthor | Hiroaki Tajima, Hiroshi Katsumata and Shin-ichiro Uekusa |