KATSUMATA Hiroshi
   Department   Undergraduate School  , School of Science and Technology
   Position   Associate Professor
Language English
Publication Date 1995/04
Type International Conference
Peer Review Peer reviewed
Title Ion-beam-induced epitaxy and solid phase epitaxy of SiGeC on Si formed by Ge and C ion implantation and their structural and optical properties
Contribution Type Co-authored (other than first author)
Journal Mater. Res. Soc. Symp. Proc.
Volume, Issue, Page 388,pp.189-194
Author and coauthor N. Kobayashi, H. Katsumata, Y. Makita, M. Hasegawa, N. Hayashi, H. Shibata, S. Uekusa and S. Hishita