|
KATSUMATA Hiroshi
Department Undergraduate School , School of Science and Technology Position Associate Professor |
|
| Language | English |
| Publication Date | 1995/04 |
| Type | International Conference |
| Peer Review | Peer reviewed |
| Title | Fabrication of epitaxial silicides thin films by combining low-energy ion beam deposition and silicon molecular beam epitaxy |
| Contribution Type | Co-authored (other than first author) |
| Journal | Mater. Res. Soc. Symp. Proc. |
| Volume, Issue, Page | 387,pp.517-522 |
| Author and coauthor | H. Shibata, Y. Makita, H. Katsumata, S. Kimura, N. Kobayashi, M. Hasegawa, S. Hishita, A.C. Beye, H. Takahashi, J. Tanabe and S. Uekusa |