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Tsutsumi Toshiyuki
Department Undergraduate School , School of Science and Technology Position Professor |
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| Language | English |
| Publication Date | 2000/11 |
| Type | Academic Journal |
| Title | 'Spectroscopic Ellipsometry Studies on Ultrathin hydrogenated Amorphous Silicon Films Prepared by Themal Chemical Vapor Deposition'(学会誌) |
| Contribution Type | Co-authored (first author) |
| Journal | The American Vacuum Society, the American Institute of PhysicsJapanese Journal of Applied Physics |
| Volume, Issue, Page | Part1, Vol.39 №11,pp.6196-6201 |
| Author and coauthor | ◎S. HAZRA*(ETL・STA fellow) , M.YAMANAKA*(ETL・主任研究員) , I. SAKATA*(ETL・主任研究員) , T, TSUTSUMI(助手) , T. MAEDA*(ETL・研究官) , E. SUZUKI*(ETL・主任研究官) |