Tsutsumi Toshiyuki
   Department   Undergraduate School  , School of Science and Technology
   Position   Professor
Language English
Publication Date 1998/09
Type Academic Journal
Title Fabrication of 40-150nm Gate Length Ultrathin n-MOSFETs using ELTRAN SOIWafers(国際会議)
Contribution Type Co-authored (first author)
Journal Extended Abstracts of International Conference on Solid State Devices and Materials, Hiroshima
Volume, Issue, Page pp.320-321
Author and coauthor ◎Eiichi Suzuki , Kenichi Ishii , Seigo Kanemaru , Tatsuro Maeda , Toshiyuki Tsutsumi(助手) , Toshiro Sekigawa , Hiroshi Hiroshima