オグラ　アツシ   Ogura Atusi   小椋　厚志    所属   明治大学  理工学部    職種   専任教授
言語種別	英語
発行・発表の年月	2003
形態種別	国際会議議事録
標題	Evaluation of commercial ultra-thin SOI substrates using laser confocal inspection system
掲載誌名	SEMICONDUCTOR WAFER BONDING VII: SCIENCE, TECHNOLOGY, AND APPLICATIONS, PROCEEDINGS
出版社・発行元	ELECTROCHEMICAL SOCIETY INC
巻・号・頁	2003(19),pp.19-24
著者・共著者	A Ogura, O Okabayashi
概要	Commercially available ultra-thin (50nm) SOI substrates were evaluated using a laser confocal inspection system. The defect distribution and corresponding defects were observed for both bonded SOI and SIMOX wafers. Some of the defects were marked in the system and evaluated by TEM after the samples were prepared by FIB. The most serious defects observed were voids in both the bonded Sol wafers and the SIMOX wafers. Small defects such as dislocations were also detected. The technique is non-destructive and therefore promising for use in pre- and in-line monitoring systems.
DOI	10.1016/j.tsf.2005.04.070