SAWANO HIROSHI    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	2013/11/08
Presentation Theme	Magnetic attraction force-preloaded aerostatic guideway for high speed nano positioning system
Conference	7th International Conference on Leading Edge Manufacturing in 21st Century
Conference Type	International
Presentation Type	Speech (General)
Contribution Type	Collaborative
Venue	Matsushima, Japan
Publisher and common publisher	Takumi Tsumura, Hayato Yoshioka, Hidenori Shinno, Hiroshi Sawano