Ogura Atusi    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	2001/04
Presentation Theme	HfO_2_ Film Formation by Metalorganic Chemical Vapor Deposition
Presentation Type	Speech (General)
Publisher and common publisher	国際会議　　Spling Meeting of The Material research Society A.Hoshino,T.Suzuki,H.Machida, and Y.Ohshita