Ogura Atusi    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	2000/10
Presentation Theme	Photoluminescence Analysis of Anealing Process in Low-Dose SIMOX Wafers
Presentation Type	Speech (General)
Publisher and common publisher	国際会議　IEEE International SOI Conference M.Tajima, s.Ibuka,J.Takiguchi,A.