Ogura Atusi    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	1998/10
Presentation Theme	Defect Characterization in UNIBOND Wafers by Pholumine scemce Spectroscopy and Transmission Electron Microscopy
Presentation Type	Speech (General)
Publisher and common publisher	国際会議　IEEE International SOI Conference M.Tajima