Ogura Atusi    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	1998/09
Presentation Theme	Oxigen Precipitates amd Related Defects in SOI Substrate Fabricated by Wafer Bonding and H^+^ Splitting
Presentation Type	Speech (General)
Publisher and common publisher	国際会議　　International Conference on Solid State Devices and Materials M.TAjima