Ogura Atusi    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	2006/03
Presentation Theme	Measurement of in-plane and depth profiles of strain in strained-Si substrates
Presentation Type	Speech (General)
Publisher and common publisher	'Second Workshop of the Thematic Network on Silicon on Insulator technology, devices and circuits (Grenoble, France) ◎D. Kosemura, K. Yamasaki, S. Tanaka and A. Ogura'