Ogura Atusi
Department Undergraduate School , School of Science and Technology Position Professor |
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Date | 2006/11 |
Presentation Theme | X-ray photoelectron spectroscopy study on SiO_2_ formed on several orientated c-Si in high pressure water vapo |
Presentation Type | Speech (General) |
Publisher and common publisher | '2006 International Workshop on DIELECTRIC THIN FILMS FOR FUTURE ULSI DEVICES: SCIENCE AND TECHNOLOGY (Kawasaki) ◎N. Yamamoto, S. Tanakak, H. Sai, R. Imai, E. Ikenaga, I. Hirosawa, Y. Ohshita and A. Ogura' |