Ogura Atusi
   Department   Undergraduate School  , School of Science and Technology
   Position   Professor
Date 2006/11
Presentation Theme SiO2/Si Interfacial Lattice Strain Revealed by Extremely Asymmetric X-ray Diffraction
Presentation Type Speech (General)
Publisher and common publisher '2006 International Workshop on DIELECTRIC THIN FILMS FOR FUTURE ULSI DEVICES: SCIENCE AND TECHNOLOGY (Kawasaki) ◎H. Yoshida, K. Akimoto, Y. Ito, T. Emoto, N. Yamamoto, Y. Ohshita, A. Ogura'