Ogura Atusi    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	2005/10
Presentation Theme	Chemical Vapor Deposition of Ni-silicide for gate electrode
Presentation Type	Speech (General)
Publisher and common publisher	'Advanced Metallization Conference 2005 (Tokyo) ◎M. Ishikawa, I. Muramoto, H. Machida, Y. Ohshita, S. Imai and A. Ogura'