Ogura Atusi    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	2005/09
Presentation Theme	Composition control of Ni-silicide by CVD using Ni(PF_3_)_4_ and Si_3_H_8_
Presentation Type	Speech (General)
Publisher and common publisher	'International Conference on Solid State Devices and Materials (Kobe, Japan) ◎M. Ishikawa, I. Muramoto, H. Machida, Y. Ohshita, S. Imai and A. Ogura'