Ogura Atusi
Department Undergraduate School , School of Science and Technology Position Professor |
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Date | 2006/10 |
Presentation Theme | W-CVD using biscyclopentadienyltungsten system |
Presentation Type | Speech (General) |
Publisher and common publisher | 'Advanced Metallization Conference, US Session (San Diego) ◎S. Imai, T. Kagawa H. Kurozaki, A. Ogura, M. Ishikawa, I. Muramoto, H, Machida ' |