Ogura Atusi    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	2005/07
Presentation Theme	Crystallinity Estimation of Strained-Si Wafers by Using Highly Parallel X-Ray Microbeam
Presentation Type	Speech (General)
Publisher and common publisher	'The 8th International Conference on X-ray Microscopy (Himeji, Japan) ◎Y. Tsusaka, K. Fukuda, N. Tomita, K. Hayashi, Y. Kagoshima, J. Matsui and A. Ogura'