Ogura Atusi    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	2006/10
Presentation Theme	Evaluation of SOI substrates with local or global strain by means of in-plane XRD measurement
Presentation Type	Speech (General)
Publisher and common publisher	'IEEE International SOI Conference (Niagara Falls) ◎D. Kosemura, K. Yamasaki, S. Tanaka, Y. Kakemura, T. Yoshida and A. Ogura'