Ogura Atusi    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	2003/09
Presentation Theme	Precursors for chemical vapor deposition of NiSi
Presentation Type	Speech (General)
Publisher and common publisher	国際会議　　International Conference on Solid State Device and Materials M.Ishikawa, T.KADa. H.Machida, Y.Ohshita