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KAWANAMI TSUYOSHI
Department Undergraduate School , School of Science and Technology Position Professor |
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| Language | English |
| Publication Date | 2014/05 |
| Type | Academic Journal |
| Peer Review | Peer reviewed |
| Title | Precise Control of Temperature Rising Speed of Wafer during Rapid Thermal Processing |
| Contribution Type | Co-authored (other than first author) |
| Journal | Journal of Mechanics Engineering and Automation |
| Journal Type | Another Country |
| Volume, Issue, Page | 4(5),pp.359-364 |
| Total page number | null |
| Author and coauthor | S. Hirasawa, K. Shirai, T. Urimoto, N. Morimoto, A. Fujiwara, S. Tada |