SAWANO HIROSHI    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Language	Japanese
Publication Date	2017/11
Type	Academic Journal
Peer Review	Peer reviewed
Title	Basic study on AFM probe using a low rigidity spring
Contribution Type	Co-authored (first author)
Journal	Transactions of the JSME
Journal Type	Japan
Volume, Issue, Page	pp.1-10
Details	Demands for machining of three-dimensional (3D) complex geometries over a large area with nanometer scale accuracy have recently increased in the various industrial sectors. In order to meet such requirements, it is necessary to realize not only a machine tool with nanometer scale machining accuracy, but also a coordinate measuring machine with a nanometer scale measuring resolution for evaluating the machined parts profile. A scanning tunneling microscopy (STM) and atomic force microscope (AFM) probes have a high measuring resolution. However, in the STM, the specimen to be measured needs to have conductivity, and the AFM cannot measure a step shape or a slope. It is thought that the application of the profile measurement by the AFM probe can be expanded, by development the AFM probe suitable for the measurement of the slope shape. Therefore, this study proposed a novel AFM probe suitable for measuring the slope shape by using a low rigidity spring. In addition, the basic characteristics of the proposed AFM probe was experimentally investigated. Investigation results confirmed that the proposed AFM probe can detect atomic forces acting between the specimen and the probe.