Miura Noboru
Department Undergraduate School , School of Science and Technology Position Associate Professor |
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Language | English |
Publication Date | 2002/01 |
Type | Academic Journal |
Title | Evaluation of Hafnium-Titanium-Oxide Thin Films Prepared by Reactive Sputtering |
Contribution Type | Co-authored (first author) |
Journal | 日本真空協会・Journal of the Vacuum Society of Japan |
Volume, Issue, Page | 45(1),pp.18-25 |
Author and coauthor | Hironaga Matsumoto, Kimio Ando, Noboru Miura and Ryotaro Nakano |