Miura Noboru
   Department   Undergraduate School  , School of Science and Technology
   Position   Associate Professor
Language English
Publication Date 2002/01
Type Academic Journal
Title Evaluation of Hafnium-Titanium-Oxide Thin Films Prepared by Reactive Sputtering
Contribution Type Co-authored (first author)
Journal 日本真空協会・Journal of the Vacuum Society of Japan
Volume, Issue, Page 45(1),pp.18-25
Author and coauthor Hironaga Matsumoto, Kimio Ando, Noboru Miura and Ryotaro Nakano