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KATSUMATA Hiroshi
Department Undergraduate School , School of Science and Technology Position Associate Professor |
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| Language | English |
| Publication Date | 2003/09 |
| Type | Academic Journal |
| Peer Review | Peer reviewed |
| Title | Development of dishing-less slurry for poly silicon chemical-mechanical polishing process |
| Contribution Type | Co-authored (other than first author) |
| Journal | Jpn. J. Appl. Phys. |
| Volume, Issue, Page | 42,pp.5433-5447 |
| Author and coauthor | N. Miyashita, S. Uekusa, M. Kodera, Y. Matsui, and H. Katsumata |