KATSUMATA Hiroshi
Department Undergraduate School , School of Science and Technology Position Associate Professor |
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Language | English |
Publication Date | 2002/08 |
Type | Academic Journal |
Peer Review | Peer reviewed |
Title | Characterization of a New Cleaning Method Using Electrolytic Ionized Water for Polysilicon Chemical Mechanical Polishing Process |
Contribution Type | Co-authored (other than first author) |
Journal | Jpn. J. Appl. Phys. |
Volume, Issue, Page | 41,pp.5098-5103 |
Author and coauthor | N. Miyashita, S. Uekusa, and H. Katsumata |