|
KATSUMATA Hiroshi
Department Undergraduate School , School of Science and Technology Position Associate Professor |
|
| Language | English |
| Publication Date | 2000/11 |
| Type | Academic Journal |
| Peer Review | Peer reviewed |
| Title | Etching, smoothing, and deposition with gas-cluster ion beam technology |
| Contribution Type | Co-authored (other than first author) |
| Journal | Surf. Coat. Technol. |
| Volume, Issue, Page | 133-134,pp.273-282 |
| Author and coauthor | J.A. Greer, D.B. Fenner, J. Hautala, L.P. Allen, V. DiFilippo, N. Toyoda, I. Yamada, J. Matsuo, E. Minami, and H. Katsumata |