KATSUMATA Hiroshi
   Department   Undergraduate School  , School of Science and Technology
   Position   Associate Professor
Language English
Publication Date 2000/03
Type Academic Journal
Peer Review Peer reviewed
Title O2 cluster ion-assisted deposition for tin-doped indium oxide films
Contribution Type Co-authored (other than first author)
Journal Nucl. Instrum. Methods Phys. Res. B
Volume, Issue, Page 161-163,pp.952-957
Author and coauthor J. Matsuo, H. Katsumata, E. Minami and I. Yamada