KATSUMATA Hiroshi
Department Undergraduate School , School of Science and Technology Position Associate Professor |
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Language | English |
Publication Date | 2000/03 |
Type | Academic Journal |
Peer Review | Peer reviewed |
Title | O2 cluster ion-assisted deposition for tin-doped indium oxide films |
Contribution Type | Co-authored (other than first author) |
Journal | Nucl. Instrum. Methods Phys. Res. B |
Volume, Issue, Page | 161-163,pp.952-957 |
Author and coauthor | J. Matsuo, H. Katsumata, E. Minami and I. Yamada |