KATSUMATA Hiroshi
   Department   Undergraduate School  , School of Science and Technology
   Position   Associate Professor
Language English
Publication Date 1999/12
Type Academic Journal
Peer Review Peer reviewed
Title High-intensity oxygen cluster ion beam generation and its application to cluster ion-assisted deposition
Contribution Type Co-authored (other than first author)
Journal Eur. Phys. J. D,
Volume, Issue, Page (9),pp.635-638
Author and coauthor J. Matsuo, E. Minami, M. Saito, N. Toyoda, H. Katsumata, and I. Yamada