KATSUMATA Hiroshi
   Department   Undergraduate School  , School of Science and Technology
   Position   Associate Professor
Language English
Publication Date 1998/06
Type International Conference
Peer Review Peer reviewed
Title Formation of oxide thin films for optical applications by O2-cluster ion beam assisted deposition
Contribution Type Co-authored (first author)
Journal IEEE proceedings of the 12th International Conference on Ion Implantation Technology, Kyoto, Japan, IEEE Cat. No.98EX144
Volume, Issue, Page pp.1195-1198
Author and coauthor H. Katsumata, J. Matsuo, T. Nishihara, T. Tachibana, E. Minami, K. Yamada, M. Adachi, and I. Yamada