KATSUMATA Hiroshi
Department Undergraduate School , School of Science and Technology Position Associate Professor |
|
Language | English |
Publication Date | 1998/06 |
Type | International Conference |
Peer Review | Peer reviewed |
Title | Formation of oxide thin films for optical applications by O2-cluster ion beam assisted deposition |
Contribution Type | Co-authored (first author) |
Journal | IEEE proceedings of the 12th International Conference on Ion Implantation Technology, Kyoto, Japan, IEEE Cat. No.98EX144 |
Volume, Issue, Page | pp.1195-1198 |
Author and coauthor | H. Katsumata, J. Matsuo, T. Nishihara, T. Tachibana, E. Minami, K. Yamada, M. Adachi, and I. Yamada |