|
KATSUMATA Hiroshi
Department Undergraduate School , School of Science and Technology Position Associate Professor |
|
| Language | English |
| Publication Date | 1997/05 |
| Type | Academic Journal |
| Peer Review | Peer reviewed |
| Title | Ion-beam-induced epitaxial crystallization (IBIEC) and solid phase epitaxial growth (SPEG) of Si1-xCx layers in Si fabricated by C ion implantation |
| Contribution Type | Co-authored (other than first author) |
| Journal | Nucl. Instrum. Methods Phys. Res. B |
| Volume, Issue, Page | 127-128,pp.350-354 |
| Author and coauthor | N. Kobayashi, D.H. Zhu, M. Hasegawa, H. Katsumata, Y. Tanaka, N. Hayashi, Y. Makita, H. Shibata, and S. Uekusa |