KATSUMATA Hiroshi
Department Undergraduate School , School of Science and Technology Position Associate Professor |
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Language | English |
Publication Date | 1996/08 |
Type | Academic Journal |
Peer Review | Peer reviewed |
Title | Synthesis of β-FeSi2 for optical applications by Fe triple-energy ion implantation into Si(100) and Si(111) substrates |
Contribution Type | Co-authored (first author) |
Journal | Thin Solid Films |
Volume, Issue, Page | 281-282,pp.252-255 |
Author and coauthor | H. Katsumata, Y. Makita, N. Kobayashi, M. Hasegawa, H. Shibata, and S. Uekusa |