KATSUMATA Hiroshi
   Department   Undergraduate School  , School of Science and Technology
   Position   Associate Professor
Language English
Publication Date 1996/08
Type Academic Journal
Peer Review Peer reviewed
Title Synthesis of β-FeSi2 for optical applications by Fe triple-energy ion implantation into Si(100) and Si(111) substrates
Contribution Type Co-authored (first author)
Journal Thin Solid Films
Volume, Issue, Page 281-282,pp.252-255
Author and coauthor H. Katsumata, Y. Makita, N. Kobayashi, M. Hasegawa, H. Shibata, and S. Uekusa