KATSUMATA Hiroshi
Department Undergraduate School , School of Science and Technology Position Associate Professor |
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Language | English |
Publication Date | 2012/04 |
Type | Academic Journal |
Peer Review | Peer reviewed |
Title | Deposition of TaN Films by RF sputtering and their barrier properties in Cu/TaN/Dielectrics/Si MIS structures |
Contribution Type | Co-authored (other than first author) |
Journal | e-Journal of Surface Science and Nanotechnology |
Volume, Issue, Page | 10,pp.107-113 |
Author and coauthor | Hiroaki Tajima, Hiroshi Katsumata and Shin-ichiro Uekusa |