KATSUMATA Hiroshi
Department Undergraduate School , School of Science and Technology Position Associate Professor |
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Language | English |
Publication Date | 1995/04 |
Type | International Conference |
Peer Review | Peer reviewed |
Title | Fabrication of epitaxial silicides thin films by combining low-energy ion beam deposition and silicon molecular beam epitaxy |
Contribution Type | Co-authored (other than first author) |
Journal | Mater. Res. Soc. Symp. Proc. |
Volume, Issue, Page | 387,pp.517-522 |
Author and coauthor | H. Shibata, Y. Makita, H. Katsumata, S. Kimura, N. Kobayashi, M. Hasegawa, S. Hishita, A.C. Beye, H. Takahashi, J. Tanabe and S. Uekusa |