KATSUMATA Hiroshi
   Department   Undergraduate School  , School of Science and Technology
   Position   Associate Professor
Language English
Publication Date 1995/02
Type International Conference
Peer Review Peer reviewed
Title Optical and structural properties of β-FeSi2 layers on Si fabricated by triple 56Fe ion implantations
Contribution Type Co-authored (first author)
Journal Proceedings of the 9th International Conference on Ion Beam Modification of Materials, Canberra, Australia
Volume, Issue, Page pp.943-946
Author and coauthor H. Katsumata, H. Shen, N. Kobayashi, Y. Makita, M. Hasegawa, H. Shibata, S. Kimura, A. Obara and S. Uekusa