|
KATSUMATA Hiroshi
Department Undergraduate School , School of Science and Technology Position Associate Professor |
|
| Language | English |
| Publication Date | 2011/03 |
| Type | Academic Journal |
| Peer Review | Peer reviewed |
| Title | Properties of TaN Films for ULSIs Prepared by
Reactive Sputter Deposition |
| Contribution Type | Co-authored (other than first author) |
| Journal | Journal of Surface Analysis |
| Volume, Issue, Page | 17(3),pp.247-251 |
| Author and coauthor | H. Tajima, N. Shiobara, H. Katsumata and S. Uekusa |