Tsutsumi Toshiyuki
Department Undergraduate School , School of Science and Technology Position Professor |
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Language | English |
Publication Date | 2003/06 |
Type | Academic Journal |
Title | Fin-Type Double-Gate Metal-Oxide and Semiconductor Field-Effect Transistors Fabricated by Orientation-Dependent Etching and Electron Beam Lithography |
Contribution Type | Co-authored (other than first author) |
Journal | Japanese Journal of Applied Physics,The IEEE Electron Devices Society |
Volume, Issue, Page | Part1,Vol.42(No.6B),pp.pp4142-4146 |
Author and coauthor | Yougxun LIU, Kenichi ISHII, Toshiyuki TSUTSUMI, Meishoku MASAHARA, Hedenori TAKASHIMA, and Eiichi SUZUKI |