Tsutsumi Toshiyuki
   Department   Undergraduate School  , School of Science and Technology
   Position   Professor
Language English
Publication Date 2003/06
Type Academic Journal
Title Fin-Type Double-Gate Metal-Oxide and Semiconductor Field-Effect Transistors Fabricated by Orientation-Dependent Etching and Electron Beam Lithography
Contribution Type Co-authored (other than first author)
Journal Japanese Journal of Applied Physics,The IEEE Electron Devices Society
Volume, Issue, Page Part1,Vol.42(No.6B),pp.pp4142-4146
Author and coauthor Yougxun LIU, Kenichi ISHII, Toshiyuki TSUTSUMI, Meishoku MASAHARA, Hedenori TAKASHIMA, and Eiichi SUZUKI