Tsutsumi Toshiyuki
   Department   Undergraduate School  , School of Science and Technology
   Position   Professor
Language English
Publication Date 2000/11
Type Academic Journal
Title 'Spectroscopic Ellipsometry Studies on Ultrathin hydrogenated Amorphous Silicon Films Prepared by Themal Chemical Vapor Deposition'(学会誌)
Contribution Type Co-authored (first author)
Journal The American Vacuum Society, the American Institute of PhysicsJapanese Journal of Applied Physics
Volume, Issue, Page Part1, Vol.39 №11,pp.6196-6201
Author and coauthor ◎S. HAZRA*(ETL・STA fellow) , M.YAMANAKA*(ETL・主任研究員) , I. SAKATA*(ETL・主任研究員) , T, TSUTSUMI(助手) , T. MAEDA*(ETL・研究官) , E. SUZUKI*(ETL・主任研究官)