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Tsutsumi Toshiyuki
Department Undergraduate School , School of Science and Technology Position Professor |
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| Language | English |
| Publication Date | 2000/11 |
| Type | Academic Journal |
| Title | 'Fabrication technology of a Si nanowire memory transistor using an inorganic electron beam resist process'(学会誌) |
| Contribution Type | Co-authored (first author) |
| Journal | The American Vacuum Society, the American institute of PhysicsJournal of Vacuum Science & Technology B |
| Volume, Issue, Page | Vol.18 №6,pp.2640-2645 |
| Author and coauthor | ◎T. TSUTSUMI(助手) , K. ISHII*(ETL・主任研究官) , H. HIROSHIMA*(ETL・主任研究官) , S. HAZRA*(ETL・STA fellow) , M. YAMANAKA*(ETL・主任研究官) , I. SAKATA*(ETL・主任研究官) , H. TAGUCHI*(Science Univ of Tokyo・大学院生) , 他2名 |