Tsutsumi Toshiyuki
   Department   Undergraduate School  , School of Science and Technology
   Position   Professor
Language English
Publication Date 2000/11
Type Academic Journal
Title 'Fabrication technology of a Si nanowire memory transistor using an inorganic electron beam resist process'(学会誌)
Contribution Type Co-authored (first author)
Journal The American Vacuum Society, the American institute of PhysicsJournal of Vacuum Science & Technology B
Volume, Issue, Page Vol.18 №6,pp.2640-2645
Author and coauthor ◎T. TSUTSUMI(助手) , K. ISHII*(ETL・主任研究官) , H. HIROSHIMA*(ETL・主任研究官) , S. HAZRA*(ETL・STA fellow) , M. YAMANAKA*(ETL・主任研究官) , I. SAKATA*(ETL・主任研究官) , H. TAGUCHI*(Science Univ of Tokyo・大学院生) , 他2名