Tsutsumi Toshiyuki
   Department   Undergraduate School  , School of Science and Technology
   Position   Professor
Language English
Publication Date 2000/07
Type Academic Journal
Title 'Fabrication Technology of Si Nanodot Nanowire Memory Transistors Using an Inorganic EB Resist Process'(国際学会議事録)
Contribution Type Co-authored (first author)
Journal The Japan Society of Applied Physics, the IEEE Electron Devices SocietyDigest of Papers: 2000 International Microprocess and Nanotechnology Conference
Volume, Issue, Page pp.182-183
Author and coauthor ◎T. TSUTSUMI(助手) , K. ISHII*(ETL・主任研究官) , H. HIROSHIMA*(ETL・主任研究官) , S. KANEMARU*(ETL・主任研究官) , E. SUZUKI*(ETL・主任研究官) , K. TOMIZAWA(教授)