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Tsutsumi Toshiyuki
Department Undergraduate School , School of Science and Technology Position Professor |
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| Language | English |
| Publication Date | 1999/01 |
| Type | Academic Journal |
| Title | Fabrication Technology of Ultrafine SiO2 masks and Si nanowires using oxidation of vertical sidewalls of a Poly-Si layer |
| Contribution Type | Co-authored (first author) |
| Journal | Journal of Vacuum Science & Technology B |
| Volume, Issue, Page | Vol.17, No.1,pp.77-81 |
| Author and coauthor | ◎Toshiyuki Tsutsumi(助手) , Kazutaka Tomizawa , Kenichi Ishii , Seigo Kanemaru , Eiichi Suzuki |