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YOKOGAWA RYO
Department Undergraduate School , School of Science and Technology Position Assistant Professor |
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| Language | English |
| Publication Date | 2020/06 |
| Type | Academic Journal |
| Peer Review | Peer reviewed |
| Title | Stress evaluation induced by wiggling silicon nitride fine pattern using Raman spectroscopy |
| Contribution Type | Co-authored (other than first author) |
| Journal | Japanese Journal of Applied Physics |
| Journal Type | Another Country |
| Volume, Issue, Page | 59(SI),pp.SIIF03-1-SIIF03-6 |
| Author and coauthor | Masato Koharada, Ryo Yokogawa, Naomi Sawamoto, Kazutoshi Yoshioka, Atsushi Ogura |
| DOI | 10.35848/1347-4065/ab7e14 |
| PermalinkURL | https://doi.org/10.35848/1347-4065/ab7e14 |