YOKOGAWA RYO
Department Undergraduate School , School of Science and Technology Position Assistant Professor |
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Language | English |
Publication Date | 2020/12 |
Type | Academic Journal |
Peer Review | Peer reviewed |
Title | Strain evaluation in Ge and Sn implanted Si layers with laser and rapid thermal annealing |
Contribution Type | Co-authored (other than first author) |
Journal | Materials Science in Semiconductor Processing |
Journal Type | Another Country |
Volume, Issue, Page | 120,pp.105282-105282 |
Author and coauthor | Shota Komago, Ryo Yokogawa, Kazutoshi Yoshioka, John O. Borland, Takashi Kuroi, Yoji Kawasaki, Atsushi Ogura |