YOKOGAWA RYO
Department Undergraduate School , School of Science and Technology Position Assistant Professor |
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Language | English |
Publication Date | 2018/05 |
Type | Academic Journal |
Peer Review | Peer reviewed |
Title | Evaluation of Anisotropic Biaxial Stress Induced Around Trench Gate of Si Power Transistor Using Water-Immersion Raman Spectroscopy |
Contribution Type | Co-authored (other than first author) |
Journal | Journal of Electronic Materials |
Journal Type | Another Country |
Volume, Issue, Page | 47,pp.5050-5055 |
Author and coauthor | Takahiro Suzuki, Ryo Yokogawa, Kohei Oasa, Tatsuya Nishiwaki, Takeshi Hamamoto, Atsushi Ogura |