|
YOKOGAWA RYO
Department Undergraduate School , School of Science and Technology Position Assistant Professor |
|
| Language | English |
| Publication Date | 2020/09 |
| Type | Academic Journal |
| Peer Review | Peer reviewed |
| Title | Evaluation of Silicon Nitride Film Formed by Atomic Layer Deposition on the Silicon Substrate with Trench Structure Using Angle-Resolved Hard X-ray Photoelectron Spectroscopy |
| Contribution Type | Co-authored (other than first author) |
| Journal | ECS Transactions |
| Journal Type | Another Country |
| Volume, Issue, Page | 98(3),pp.113-120 |
| Author and coauthor | Tapei Nishihara, Ryo Yokogawa, Yuji Otsuki, Munehito Kagaya, Atsushi Ogura |