YOKOGAWA RYO
Department Undergraduate School , School of Science and Technology Position Assistant Professor |
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Language | English |
Publication Date | 2022/02 |
Type | Academic Journal |
Peer Review | Peer reviewed |
Title | Modification and Characterization of Interfacial Bonding for Thermal Management of Ruthenium Interconnects in Next-Generation Very-Large-Scale Integration Circuits |
Contribution Type | Co-authored (other than first author) |
Journal | ACS Applied Materials and Interfaces |
Journal Type | Another Country |
Volume, Issue, Page | 14(5),pp.7392-7404 |
International coauthorship | International coauthorship |
Details | Tianzhuo Zhan, Keita Sahara, Haruki Takeuchi, Ryo Yokogawa, Kaito Oda, Zhicheng Jin, Shikang Deng, Motohiro Tomita, Yen Ju Wu, Yibin Xu, Takeo Matsuki, Haidong Wang, Mengjie Song, Sujun Guan, Atsushi Ogura, Takanobu Watanabe |