YOKOGAWA RYO
   Department   Undergraduate School  , School of Science and Technology
   Position   Assistant Professor
Language English
Publication Date 2022/02
Type Academic Journal
Peer Review Peer reviewed
Title Modification and Characterization of Interfacial Bonding for Thermal Management of Ruthenium Interconnects in Next-Generation Very-Large-Scale Integration Circuits
Contribution Type Co-authored (other than first author)
Journal ACS Applied Materials and Interfaces
Journal TypeAnother Country
Volume, Issue, Page 14(5),pp.7392-7404
International coauthorship International coauthorship
Details Tianzhuo Zhan, Keita Sahara, Haruki Takeuchi, Ryo Yokogawa, Kaito Oda, Zhicheng Jin, Shikang Deng, Motohiro Tomita, Yen Ju Wu, Yibin Xu, Takeo Matsuki, Haidong Wang, Mengjie Song, Sujun Guan, Atsushi Ogura, Takanobu Watanabe