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KATSUMATA Hiroshi
Department Undergraduate School , School of Science and Technology Position Associate Professor |
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| Country of acquisition | Foreign country (韓国) |
| Propery type | Patent |
| Country of applicant | Foreign country |
| Patent No. | KR1009379110000(大韓民国) |
| Date of Grant | 2010/01/13 |
| Patent Title | METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE |