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SAWANO HIROSHI
Department Undergraduate School , School of Science and Technology Position Professor |
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| Date | 2010/06/02 |
| Presentation Theme | Sub-nanometer positioning with a high resolution laser interferometer |
| Conference | 10th International Conference of the European Society for Precision Engineering and Nanotechnology |
| Conference Type | International |
| Presentation Type | Poster |
| Contribution Type | Collaborative |
| Venue | Delft, Neither Land |
| Publisher and common publisher | Hayato Yoshioka, Shota Kuroyama, Hiroshi Sawano, Hidenori Shinno |