KATSUMATA Hiroshi    Department   Undergraduate School  , School of Science and Technology    Position   Associate Professor
Date	2019/03/11
Presentation Theme	Formation of amorphous and nanocrystalline SiC in Si oxide films and evaluation of their optical properties
Conference Type	Domestic
Presentation Type	Speech (General)
Contribution Type	Collaborative
Publisher and common publisher	Rei Narimatsu, Toshiei Kawamura, Kazusa Morimoto, Hiroshi Katsumata